Inventor
UNO SHINOBU
JP8 patents
⚠️ This page may combine multiple inventors who share the name “UNO SHINOBU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
JEOL LTD
6 patentsUS7095031B2Aug 22, 2006
Method of automatically correcting aberrations in charged-particle beam and apparatus therefor
JEOL LTD12 citations82
US7355175B2Apr 8, 2008
Method and apparatus for automatically correcting charged-particle beam and method of controlling aberration corrector for charged-particle beam
JEOL LTD8 citations71
US7145154B2Dec 5, 2006
Method of automatically correcting aberrations in charged-particle beam and apparatus therefor
JEOL LTD8 citations71
US6930312B2Aug 16, 2005
Charged-particle beam instrument and method of correcting aberration therein
JEOL LTD9 citations71
US7605378B2Oct 20, 2009
Charged-particle beam system
JEOL LTD3 citations61
US7205551B2Apr 17, 2007
Method of correcting chromatic aberrations in charged-particle beam and charged-particle beam system
JEOL LTD6 citations60