Inventor
OKITA SHINICHI
JP17 patents
⚠️ This page may combine multiple inventors who share the name “OKITA SHINICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
11 patentsUS6992751B2Jan 31, 2006
Scanning exposure apparatus
NIKON CORP175 citations98
US7838858B2Nov 23, 2010
Evaluation system and method of a search operation that detects a detection subject on an object
NIKON CORP21 citations92
US6538721B2Mar 25, 2003
Scanning exposure apparatus
NIKON CORP23 citations92
US5479537ADec 26, 1995
Image processing method and apparatus
NIKON CORP48 citations92
US7941232B2May 10, 2011
Control method, control system, and program
NIKON CORP19 citations83
US7746446B2Jun 29, 2010
Alignment condition determination method and apparatus of the same, and exposure method and apparatus of the same
NIKON CORP10 citations83
US7718327B2May 18, 2010
Overlay management method and apparatus, processing apparatus, measurement apparatus and exposure apparatus, device manufacturing system and device manufacturing method, and program and information recording medium
NIKON CORP9 citations83
US7593100B2Sep 22, 2009
Measuring method, measuring system, inspecting method, inspecting system, exposure method and exposure system, in which information as to the degree of the flatness of an object is pre-obtained
NIKON CORP15 citations83
US7855784B2Dec 21, 2010
Substrate processing method, substrate processing system, program, and recording medium
NIKON CORP4 citations62
US7688436B2Mar 30, 2010
Measuring and/or inspecting method, measuring and/or inspecting apparatus, exposure method, device manufacturing method, and device manufacturing apparatus
NIKON CORP6 citations62
US8355113B2Jan 15, 2013
Exposure apparatus, exposure method and device manufacturing method
NIKON CORP0 citations41
OKITA SHINICHI
5 patentsUS8982320B2Mar 17, 2015
Alignment information display method and its program, alignment method, exposure method, device production process, display system, display device, and program and measurement/inspection system
OKITA SHINICHI10 citations83
US8566756B2Oct 22, 2013
Processing condition determining method and apparatus, display method and apparatus, processing apparatus, measurement apparatus and exposure apparatus, substrate processing system, and program and information recording medium
OKITA SHINICHI14 citations83
US8159650B2Apr 17, 2012
Device manufacturing method, device manufacturing system, and measurement/inspection apparatus
OKITA SHINICHI8 citations82
US8134681B2Mar 13, 2012
Adjustment method, substrate processing method, substrate processing apparatus, exposure apparatus, inspection apparatus, measurement and/or inspection system, processing apparatus, computer system, program and information recording medium
OKITA SHINICHI6 citations72
US8090875B2Jan 3, 2012
Device and method for connecting device manufacturing processing apparatuses, program, device manufacturing processing system, exposure apparatus and method, and measurement and inspection apparatus and method
OKITA SHINICHI0 citations40