Inventor

RANGELOW IVO

DE10 patents

⚠️ This page may combine multiple inventors who share the name “RANGELOW IVO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

RANGELOW IVO

3 patents

US10025207B2Jul 17, 2018

Method of aligning a first article relative to a second article

RANGELOW IVO2 citations69

US7141808B2Nov 28, 2006

Device and method for maskless AFM microlithography

RANGELOW IVO8 citations63

US8128282B2Mar 6, 2012

Microsystem component with a device deformable under the effect of temperature changes

RANGELOW IVO2 citations52

UNI KASSEL

2 patents

US7946029B2May 24, 2011

Apparatus for aligning a first article relative to a second article

UNI KASSEL7 citations79

US7183043B2Feb 27, 2007

Shadow mask and method for producing a shadow mask

UNI KASSEL6 citations55

OLYNICK DEIRDRE

1 patent

US8546264B2Oct 1, 2013

Etching radical controlled gas chopped deep reactive ion etching

OLYNICK DEIRDRE7 citations73

MASSACHUSETTS INST TECHNOLOGY

1 patent

US11906546B2Feb 20, 2024

Coated active cantilever probes for use in topography imaging in opaque liquid environments, and methods of performing topography imaging

MASSACHUSETTS INST TECHNOLOGY0 citations43

PARCAN NANOTECH CO LTD

1 patent

US11798987B2Oct 24, 2023

Substrate for a controlled implantation of ions and method of preparing a substrate for a controlled implantation of ions

PARCAN NANOTECH CO LTD0 citations41

SCHENKEL THOMAS

1 patent

US9161429B2Oct 13, 2015

Compact ion source neutron generator

SCHENKEL THOMAS0 citations35

KOLB STEFAN

1 patent

US8466061B2Jun 18, 2013

Method for forming a through via in a semiconductor element and semiconductor element comprising the same

KOLB STEFAN0 citations32