Inventor

PRANATHARTHI HARAN BALASUBRAMANIAN S

US18 patents

⚠️ This page may combine multiple inventors who share the name “PRANATHARTHI HARAN BALASUBRAMANIAN S”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

PRANATHARTHI HARAN BALASUBRAMANIAN S

IBM

Middle of line cobalt interconnection

Nanosheet transistors with sharp junctions

Method and process for forming a self-aligned silicide contact

Self-aligned gate contact compatible cross couple contact formation

Late gate cut with optimized contact trench size

Gate height and spacer uniformity

Mixed lithography with dual resist and a single pattern transfer

Selective deposition with SAM for fully aligned via

Nanosheet transistors with sharp junctions

Vertical field effect transistor with bottom source-drain region

Subtractive RIE interconnect

Self-aligned isolation for nanosheet transistor

Selective silicide formation by electrodeposit displacement reaction

Gate height and spacer uniformity

Interconnects including dual-metal vias

GLOBALFOUNDRIES INC

Methods of forming a combined gate and source/drain contact structure and the resulting device

CABRAL JR CYRIL

Method and process for forming a self-aligned silicide contact

FULLER NICHOLAS C

Mixed lithography with dual resist and a single pattern transfer