Inventor
FONG HENRY
US7 patents
⚠️ This page may combine multiple inventors who share the name “FONG HENRY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
3 patentsUS6284093B1Sep 4, 2001
Shield or ring surrounding semiconductor workpiece in plasma chamber
APPLIED MATERIALS INC133 citations98
US6689249B2Feb 10, 2004
Shield or ring surrounding semiconductor workpiece in plasma chamber
APPLIED MATERIALS INC48 citations95
US6440864B1Aug 27, 2002
Substrate cleaning process
APPLIED MATERIALS INC119 citations95