Inventor
KAMAJI YOSHITO
JP6 patents
Patents
6 patentsUS10184173B1Jan 22, 2019
Plasma processing method
HITACHI HIGH TECH CORP5 citations67
US12080529B2Sep 3, 2024
Plasma processing apparatus and prediction method of the condition of plasma processing apparatus
HITACHI HIGH TECH CORP0 citations60
US11107664B2Aug 31, 2021
Plasma processing apparatus and prediction apparatus of the condition of plasma processing apparatus
HITACHI HIGH TECH CORP1 citations60
US10886110B2Jan 5, 2021
Plasma processing apparatus and prediction method of the condition of plasma processing apparatus
HITACHI HIGH TECH CORP0 citations60
US12444591B2Oct 14, 2025
Diagnosis device, diagnosis method, plasma processing apparatus, and semiconductor device manufacturing system
HITACHI HIGH TECH CORP0 citations50
US12387921B2Aug 12, 2025
Apparatus diagnostic apparatus, apparatus diagnostic method, plasma processing apparatus and semiconductor device manufacturing system
HITACHI HIGH TECH CORP0 citations50