Inventor
TANIGUCHI TAKUHIRO
JP5 patents
Patents
5 patentsUS11592746B2Feb 28, 2023
Radiation-sensitive resin composition, resist pattern-forming method, compound and method of generating acid
JSR CORP4 citations70
US11609495B2Mar 21, 2023
Radiation-sensitive resin composition and resist pattern-forming method
JSR CORP3 citations69
US12158700B2Dec 3, 2024
Photosensitive resin composition, method for forming resist pattern, method for manufacturing plated molded article, and semiconductor apparatus
JSR CORP0 citations50
US12092957B2Sep 17, 2024
Radiation-sensitive resin composition, method for forming resist pattern and compound
JSR CORP0 citations48
US11966161B2Apr 23, 2024
Radiation-sensitive resin composition, method of forming resist pattern, and compound
JSR CORP0 citations48