Inventor
KIRIYAMA KAZUYA
JP5 patents
⚠️ This page may combine multiple inventors who share the name “KIRIYAMA KAZUYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
JSR CORP
4 patentsUS11592746B2Feb 28, 2023
Radiation-sensitive resin composition, resist pattern-forming method, compound and method of generating acid
JSR CORP4 citations70
US11609495B2Mar 21, 2023
Radiation-sensitive resin composition and resist pattern-forming method
JSR CORP3 citations69
US12092957B2Sep 17, 2024
Radiation-sensitive resin composition, method for forming resist pattern and compound
JSR CORP0 citations48
US11966161B2Apr 23, 2024
Radiation-sensitive resin composition, method of forming resist pattern, and compound
JSR CORP0 citations48