Inventor

HIRANE KENICHI

JP5 patents

⚠️ This page may combine multiple inventors who share the name “HIRANE KENICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI SCIENCE SYSTEMS LTD

2 patents

US6949752B2Sep 27, 2005

Electron beam apparatus and high-voltage discharge prevention method

HITACHI SCIENCE SYSTEMS LTD12 citations82

US7274017B2Sep 25, 2007

Electron beam apparatus and high-voltage discharge prevention method

HITACHI SCIENCE SYSTEMS LTD1 citations51

HITACHI HIGH TECH CORP

2 patents

US9355815B2May 31, 2016

Electron microscope and electron beam detector

HITACHI HIGH TECH CORP2 citations62

US7365323B2Apr 29, 2008

Environmental scanning electron microcope

HITACHI HIGH TECH CORP3 citations57

HITACHI LTD

1 patent

US5047647ASep 10, 1991

Electron beam lithography apparatus

HITACHI LTD22 citations91