Inventor
MARUKAWA TAKASHI
JP5 patents
Patents
5 patentsUS5627090AMay 6, 1997
Semiconductor element and process for production for the same
MURATA MANUFACTURING CO10 citations72
US7112913B2Sep 26, 2006
Surface acoustic wave apparatus and manufacturing method therefor
MURATA MANUFACTURING CO6 citations71
US6792656B2Sep 21, 2004
Surface acoustic wave apparatus and manufacturing method therefor
MURATA MANUFACTURING CO6 citations71
US6458675B1Oct 1, 2002
Semiconductor device having a plasma-processed layer and method of manufacturing the same
MURATA MANUFACTURING CO11 citations70
US5578844ANov 26, 1996
Semiconductor element and process for production for the same
MURATA MANUFACTURING CO4 citations61