P

Inventor

SAKAI KEITA

JP22 patents
⚠️ This page may combine multiple inventors who share the name “SAKAI KEITA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CANON KK

14 patents
US6479212B1Nov 12, 2002

Photosensitive resin, resist composition using the photosensitive resin, pattern formation method using the resist composition, device produced by the pattern formation method, and exposure method

CANON KK18 citations92
US6225019B1May 1, 2001

Photosensitive resin, resist based on the photosensitive resin, exposure apparatus and exposure method using the resist, and semiconductor device obtained by the exposure method

CANON KK27 citations92
US6008942ADec 28, 1999

Diffractive optical element and optical instrument having the same

CANON KK23 citations92
US7705966B2Apr 27, 2010

Immersion exposure apparatus

CANON KK13 citations84
US7394522B2Jul 1, 2008

Exposure apparatus and device manufacturing method

CANON KK12 citations82
US5952149ASep 14, 1999

Resist solution for photolithography including a base resin and an oxygen-free or low-oxygen solvent

CANON KK13 citations74
US6331383B1Dec 18, 2001

Patterning method, and method for manufacturing semiconductor device

CANON KK13 citations73
US6087076AJul 11, 2000

Method of manufacturing semiconductor devices by performing coating, heating, exposing and developing in a low-oxygen or oxygen free controlled environment

CANON KK3 citations63
US7714980B2May 11, 2010

Exposure apparatus, exposure method, and exposure system

CANON KK3 citations62
US11267252B2Mar 8, 2022

Ejection apparatus and imprint apparatus

CANON KK0 citations60
US9829789B2Nov 28, 2017

Method for determining pattern of mold for imprint, imprint method, and apparatus

CANON KK1 citations52
US11752686B2Sep 12, 2023

Imprint apparatus and method of controlling imprint apparatus

CANON KK0 citations51
US7754011B2Jul 13, 2010

Method of manufacturing a calcium fluoride single crystal

CANON KK1 citations51
US7105049B2Sep 12, 2006

Method of manufacturing single crystal calcium fluoride

CANON KK1 citations51

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD

5 patents

PANASONIC IP MAN CO LTD

1 patent

SAKAI KEITA

1 patent

SANWA KAGAKU KENKYUSHO CO

1 patent