Inventor

OSAWA YOICHI

JP3 patents

Patents

3 patents

US5880169AMar 9, 1999

Sulfonium salts and chemically amplified positive resist compositions

SHINETSU CHEMICAL CO59 citations95

US5705702AJan 6, 1998

Method for preparing triarylsulfonium salts

SHINETSU CHEMICAL CO43 citations91

US5824824AOct 20, 1998

Sulfonium salts and chemically amplified positive resist compositions

SHINETSU CHEMICAL CO31 citations90