Inventor
SPARKS TERRY G
US10 patents
⚠️ This page may combine multiple inventors who share the name “SPARKS TERRY G”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FREESCALE SEMICONDUCTOR INC
7 patentsUS6858542B2Feb 22, 2005
Semiconductor fabrication method for making small features
FREESCALE SEMICONDUCTOR INC24 citations90
US6924184B2Aug 2, 2005
Semiconductor device and method for forming a semiconductor device using post gate stack planarization
FREESCALE SEMICONDUCTOR INC27 citations89
US6838354B2Jan 4, 2005
Method for forming a passivation layer for air gap formation
FREESCALE SEMICONDUCTOR INC24 citations89
US7544605B2Jun 9, 2009
Method of making a contact on a backside of a die
FREESCALE SEMICONDUCTOR INC15 citations83
US7741218B2Jun 22, 2010
Conductive via formation utilizing electroplating
FREESCALE SEMICONDUCTOR INC7 citations73
US6884727B2Apr 26, 2005
Semiconductor fabrication process for modifying the profiles of patterned features
FREESCALE SEMICONDUCTOR INC8 citations73
US7955968B2Jun 7, 2011
Pseudo hybrid structure for low K interconnect integration
FREESCALE SEMICONDUCTOR INC1 citations52
MOTOROLA INC
3 patentsUS6686633B1Feb 3, 2004
Semiconductor device, memory cell, and processes for forming them
MOTOROLA INC16 citations91
US6184073B1Feb 6, 2001
Process for forming a semiconductor device having an interconnect or conductive film electrically insulated from a conductive member or region
MOTOROLA INC27 citations91
US6245686B1Jun 12, 2001
Process for forming a semiconductor device and a process for operating an apparatus
MOTOROLA INC3 citations54