Inventor
IKOTA MASAMI
JP13 patents
⚠️ This page may combine multiple inventors who share the name “IKOTA MASAMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
9 patentsUS12148593B2Nov 19, 2024
Ion beam device
HITACHI HIGH TECH CORP1 citations62
US10943762B2Mar 9, 2021
Inspection system, image processing device and inspection method
HITACHI HIGH TECH CORP1 citations61
US10672119B2Jun 2, 2020
Inspection device
HITACHI HIGH TECH CORP1 citations61
US8358406B2Jan 22, 2013
Defect inspection method and defect inspection system
HITACHI HIGH TECH CORP2 citations60
US9823065B2Nov 21, 2017
Surface measurement apparatus
HITACHI HIGH TECH CORP1 citations52
US11713963B2Aug 1, 2023
Pattern shape evaluation device, pattern shape evaluation system, and pattern shape evaluation method
HITACHI HIGH TECH CORP0 citations49
US11430106B2Aug 30, 2022
Image processing device, image processing method and charged particle microscope
HITACHI HIGH TECH CORP0 citations49
US9831062B2Nov 28, 2017
Method for pattern measurement, method for setting device parameters of charged particle radiation device, and charged particle radiation device
HITACHI HIGH TECH CORP0 citations41
US10295339B2May 21, 2019
Pattern measurement method and measurement apparatus
HITACHI HIGH TECH CORP0 citations40