Inventor
NAKAMURA HISATO
JP15 patents
⚠️ This page may combine multiple inventors who share the name “NAKAMURA HISATO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
7 patentsUS6411377B1Jun 25, 2002
Optical apparatus for defect and particle size inspection
HITACHI LTD174 citations99
US7940383B2May 10, 2011
Method of detecting defects on an object
HITACHI LTD42 citations95
US7692779B2Apr 6, 2010
Apparatus and method for testing defects
HITACHI LTD12 citations92
US7639350B2Dec 29, 2009
Apparatus and method for testing defects
HITACHI LTD25 citations92
US7443496B2Oct 28, 2008
Apparatus and method for testing defects
HITACHI LTD16 citations92
US6597448B1Jul 22, 2003
Apparatus and method of inspecting foreign particle or defect on a sample
HITACHI LTD44 citations92
US6365425B1Apr 2, 2002
Method of manufacturing semiconductor device
HITACHI LTD26 citations92
HITACHI ELECTR ENG
5 patentsUS5694214ADec 2, 1997
Surface inspection method and apparatus
HITACHI ELECTR ENG86 citations96
US5880828AMar 9, 1999
Surface defect inspection device and shading correction method therefor
HITACHI ELECTR ENG36 citations92
US5818576AOct 6, 1998
Extraneous substance inspection apparatus for patterned wafer
HITACHI ELECTR ENG36 citations92
US5644393AJul 1, 1997
Extraneous substance inspection method and apparatus
HITACHI ELECTR ENG51 citations92
US5724132AMar 3, 1998
Extraneous substance inspection apparatus for patterned wafer
HITACHI ELECTR ENG4 citations63