Inventor
MANDAL ROBERT
US3 patents
Patents
3 patentsUS6245690B1Jun 12, 2001
Method of improving moisture resistance of low dielectric constant films
APPLIED MATERIALS INC132 citations98
US6448187B2Sep 10, 2002
Method of improving moisture resistance of low dielectric constant films
APPLIED MATERIALS INC98 citations97
US6743737B2Jun 1, 2004
Method of improving moisture resistance of low dielectric constant films
APPLIED MATERIALS INC39 citations95