Inventor

GOVIL PRADEEP KUMAR

US4 patents

⚠️ This page may combine multiple inventors who share the name “GOVIL PRADEEP KUMAR”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MANKALA KALYAN KUMAR

2 patents

US9136751B2Sep 15, 2015

Linear motor magnetic shield apparatus for lithographic systems

MANKALA KALYAN KUMAR0 citations41

US9130443B2Sep 8, 2015

Linear motor magnetic shield apparatus

MANKALA KALYAN KUMAR1 citations41

SILICON VALLEY GROUP

1 patent

US6509952B1Jan 21, 2003

Method and system for selective linewidth optimization during a lithographic process

SILICON VALLEY GROUP322 citations96

ASML US INC

1 patent

US6556281B1Apr 29, 2003

Flexible piezoelectric chuck and method of using the same

ASML US INC36 citations89