Inventor
HOWELLS JOHN
US7 patents
Patents
7 patentsUS6183186B1Feb 6, 2001
Wafer handling system and method
DAITRON INC162 citations93
US6152680ANov 28, 2000
Wafer cassette rotation mechanism
DAITRON INC29 citations91
US6816251B2Nov 9, 2004
Method and apparatus for detecting defects along the edge of electronic media
DAITRON INC19 citations89
US6545752B1Apr 8, 2003
Method and apparatus for detecting defects along the edge of electronic media
DAITRON INC18 citations89
US5915910AJun 29, 1999
Semiconductor wafer transfer method and apparatus
DAITRON INC33 citations89
US6566673B1May 20, 2003
Method and apparatus for detecting defects along the edge of electronic media
DAITRON INC8 citations68
US6053668AApr 25, 2000
Water slide for transferring semiconductor wafers
DAITRON INC2 citations57