Inventor

VAN DEN BERG JANNES REMCO

NL2 patents

Patents

2 patents

US6835039B2Dec 28, 2004

Method and apparatus for batch processing of wafers in a furnace

ASM INT519 citations94

US7033126B2Apr 25, 2006

Method and apparatus for loading a batch of wafers into a wafer boat

ASM INT65 citations92