Inventor
LITTAU MICHAEL E
US4 patents
Patents
4 patentsUS6606152B2Aug 12, 2003
Determination of center of focus by diffraction signature analysis
ACCENT OPTICAL TECH INC108 citations95
US6429930B1Aug 6, 2002
Determination of center of focus by diffraction signature analysis
ACCENT OPTICAL TECH INC84 citations95
US7119893B2Oct 10, 2006
Determination of center of focus by parameter variability analysis
ACCENT OPTICAL TECH INC21 citations90
US7110099B2Sep 19, 2006
Determination of center of focus by cross-section analysis
ACCENT OPTICAL TECH INC23 citations90