Inventor

LONDERGAN ANA R

US10 patents

⚠️ This page may combine multiple inventors who share the name “LONDERGAN ANA R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

GENUS INC

5 patents

US6905547B1Jun 14, 2005

Method and apparatus for flexible atomic layer deposition

GENUS INC78 citations95

US6720259B2Apr 13, 2004

Passivation method for improved uniformity and repeatability for atomic layer deposition and chemical vapor deposition

GENUS INC56 citations94

US7129580B1Oct 31, 2006

Methods and procedures for engineering of composite conductive films by atomic layer deposition

GENUS INC13 citations83

US7183649B1Feb 27, 2007

Methods and procedures for engineering of composite conductive films by atomic layer deposition

GENUS INC6 citations73

US7164203B1Jan 16, 2007

Methods and procedures for engineering of composite conductive by atomic layer deposition

GENUS INC8 citations73

AIXTRON INC

2 patents

US7981473B2Jul 19, 2011

Transient enhanced atomic layer deposition

AIXTRON INC63 citations95

US7981472B2Jul 19, 2011

Methods of providing uniform gas delivery to a reactor

AIXTRON INC13 citations83

QUALCOMM MEMS TECHNOLOGIES INC

1 patent

US7733552B2Jun 8, 2010

MEMS cavity-coating layers and methods

QUALCOMM MEMS TECHNOLOGIES INC18 citations92

ALAM KHURSHID SYED

1 patent

US8536059B2Sep 17, 2013

Equipment and methods for etching of MEMS

ALAM KHURSHID SYED11 citations78

LONDERGAN ANA R

1 patent

US8164815B2Apr 24, 2012

MEMS cavity-coating layers and methods

LONDERGAN ANA R6 citations78