Inventor
STAECKER JENS
DE7 patents
⚠️ This page may combine multiple inventors who share the name “STAECKER JENS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INFINEON TECHNOLOGIES AG
6 patentsUS7401549B2Jul 22, 2008
Arrangement for transferring information/structures to wafers
INFINEON TECHNOLOGIES AG10 citations77
US6861331B2Mar 1, 2005
Method for aligning and exposing a semiconductor wafer
INFINEON TECHNOLOGIES AG7 citations71
US7268877B2Sep 11, 2007
Method and apparatus for orienting semiconductor wafers in semiconductor fabrication
INFINEON TECHNOLOGIES AG4 citations59
US7310129B2Dec 18, 2007
Method for carrying out a double or multiple exposure
INFINEON TECHNOLOGIES AG2 citations57
US7186484B2Mar 6, 2007
Method for determining the relative positional accuracy of two structure elements on a wafer
INFINEON TECHNOLOGIES AG3 citations55
US6896999B2May 24, 2005
Method of exposing a semiconductor wafer in an exposer
INFINEON TECHNOLOGIES AG0 citations38