Inventor

BRUCH JENS UWE

DE2 patents

Patents

2 patents

US7310129B2Dec 18, 2007

Method for carrying out a double or multiple exposure

INFINEON TECHNOLOGIES AG2 citations57

US7186484B2Mar 6, 2007

Method for determining the relative positional accuracy of two structure elements on a wafer

INFINEON TECHNOLOGIES AG3 citations55