Inventor

KAWAWA MASAHIRO

JP2 patents

Patents

2 patents

US6791084B2Sep 14, 2004

Method and scanning electron microscope for measuring dimension of material on sample

HITACHI HIGH TECH CORP51 citations93

US7385196B2Jun 10, 2008

Method and scanning electron microscope for measuring width of material on sample

HITACHI HIGH TECH CORP2 citations60