Inventor
MARQUEZ LINDA
US4 patents
⚠️ This page may combine multiple inventors who share the name “MARQUEZ LINDA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
3 patentsUS9558928B2Jan 31, 2017
Contact clean in high-aspect ratio structures
LAM RES CORP7 citations81
US10825659B2Nov 3, 2020
Substrate processing chamber including multiple gas injection points and dual injector
LAM RES CORP8 citations79
US9911620B2Mar 6, 2018
Method for achieving ultra-high selectivity while etching silicon nitride
LAM RES CORP3 citations71