Inventor

GROSSE AXEL

DE8 patents

⚠️ This page may combine multiple inventors who share the name “GROSSE AXEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SCHMITZ VOLKER

3 patents

US8154094B2Apr 10, 2012

Micromechanical component having a cap having a closure

SCHMITZ VOLKER2 citations57

US9114975B2Aug 25, 2015

Micromechanical component and method for producing a micromechanical component having a thin-layer cap

SCHMITZ VOLKER0 citations46

US8809095B2Aug 19, 2014

Micromechanical component and method for producing a micromechanical component having a thin-layer cap

SCHMITZ VOLKER0 citations46

BOSCH GMBH ROBERT

1 patent

US10927004B2Feb 23, 2021

Method for bonding wafers eutectically, and a wafer composite

BOSCH GMBH ROBERT1 citations59

BISCHOF UDO

1 patent

US8304845B2Nov 6, 2012

Method for sealing an opening

BISCHOF UDO4 citations55

ZOELLIN JOCHEN

1 patent

US9042581B2May 26, 2015

Component having a micromechanical microphone structure, and method for manufacturing same

ZOELLIN JOCHEN1 citations50

STAHL HEIKO

1 patent

US8402827B2Mar 26, 2013

Sensor element and method for operating a sensor element

STAHL HEIKO1 citations48

GONSKA JULIAN

1 patent

US8530260B2Sep 10, 2013

Method for attaching a first carrier device to a second carrier device and micromechanical components

GONSKA JULIAN0 citations37