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Inventor
ABDUL-HALIM IBRAHIM
IL
2 patents
Patents
2 patents
US8179530B2
May 15, 2012
Methods and systems for determining a critical dimension and overlay of a specimen
LEVY ADY
143 citations
97
US8502979B2
Aug 6, 2013
Methods and systems for determining a critical dimension and overlay of a specimen
LEVY ADY
24 citations
91