P

Inventor

MAEKAWA KOJI

JP46 patents
⚠️ This page may combine multiple inventors who share the name “MAEKAWA KOJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

14 patents
US9536782B2Jan 3, 2017

Tungsten film forming method, semiconductor device manufacturing method, and storage medium

TOKYO ELECTRON LTD9 citations83
US9640404B2May 2, 2017

Method of forming tungsten film

TOKYO ELECTRON LTD4 citations73
US10026616B2Jul 17, 2018

Method of reducing stress in metal film and metal film forming method

TOKYO ELECTRON LTD4 citations72
US7695763B2Apr 13, 2010

Method for cleaning process chamber of substrate processing apparatus, substrate processing apparatus, and method for processing substrate

TOKYO ELECTRON LTD6 citations72
US7691208B2Apr 6, 2010

Cleaning method

TOKYO ELECTRON LTD4 citations63
US11802334B2Oct 31, 2023

Tungsten film-forming method, film-forming system and storage medium

TOKYO ELECTRON LTD0 citations62
US11401609B2Aug 2, 2022

Film forming method and film forming system

TOKYO ELECTRON LTD0 citations62
US11171004B2Nov 9, 2021

Film forming method and substrate processing system

TOKYO ELECTRON LTD0 citations62
US10954593B2Mar 23, 2021

Tungsten film-forming method, film-forming system and storage medium

TOKYO ELECTRON LTD0 citations62
US10886170B2Jan 5, 2021

Method of forming tungsten film

TOKYO ELECTRON LTD0 citations62
US10400330B2Sep 3, 2019

Tungsten film forming method and storage medium

TOKYO ELECTRON LTD1 citations59
US10784110B2Sep 22, 2020

Tungsten film forming method, film forming system and film forming apparatus

TOKYO ELECTRON LTD0 citations51
US10612139B2Apr 7, 2020

Method of forming a tungsten film having a low resistance

TOKYO ELECTRON LTD0 citations51
US10131986B2Nov 20, 2018

Method of forming metal film

TOKYO ELECTRON LTD1 citations51

RENESAS ELECTRONICS CORP

5 patents

MAEKAWA KOJI

5 patents

PIONEER TOHOKU CORP

4 patents

SHARP KK

4 patents

PIONEER CORP

3 patents

MITA INDUSTRIAL CO LTD

3 patents

OMRON TATEISI ELECTRONICS CO

2 patents

NGK SPARK PLUG CO

1 patent

HOKKAI CAN

1 patent

OGASAWARA YASUAKI

1 patent

KOBAYASHI HIROYUKI

1 patent

KONUMA SINSUKE

1 patent

ISHIZUKA SHUUICHI

1 patent