Inventor
ZANGOOIE SHAHIN
US13 patents
⚠️ This page may combine multiple inventors who share the name “ZANGOOIE SHAHIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
9 patentsUS7808657B2Oct 5, 2010
Wafer and stage alignment using photonic devices
IBM4 citations62
US7742160B2Jun 22, 2010
Determining angle of incidence with respect to workpiece
IBM4 citations60
US7791723B2Sep 7, 2010
Optical measurement using fixed polarizer
IBM0 citations51
US8736275B2May 27, 2014
Alignment correction system and method of use
IBM0 citations50
US8680871B2Mar 25, 2014
Alignment correction system and method of use
IBM0 citations50
US7646491B2Jan 12, 2010
Determining azimuth angle of incident beam to wafer
IBM0 citations50
US7592817B2Sep 22, 2009
Alignment correction system and method of use
IBM0 citations50
US7542136B2Jun 2, 2009
Flipping stage arrangement for reduced wafer contamination cross section and improved measurement accuracy and throughput
IBM1 citations50
US7477365B2Jan 13, 2009
Optical spot geometric parameter determination using calibration targets
IBM0 citations39