Inventor
YOUNG ROGER M
US14 patents
⚠️ This page may combine multiple inventors who share the name “YOUNG ROGER M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
11 patentsUS7248936B1Jul 24, 2007
Automated tool recipe verification and correction
IBM17 citations80
US7937177B2May 3, 2011
Manufacturing work in process management system
IBM2 citations60
US7742160B2Jun 22, 2010
Determining angle of incidence with respect to workpiece
IBM4 citations60
US7318206B2Jan 8, 2008
Offset determination for measurement system matching
IBM5 citations54
US8736275B2May 27, 2014
Alignment correction system and method of use
IBM0 citations50
US8680871B2Mar 25, 2014
Alignment correction system and method of use
IBM0 citations50
US7646491B2Jan 12, 2010
Determining azimuth angle of incident beam to wafer
IBM0 citations50
US7592817B2Sep 22, 2009
Alignment correction system and method of use
IBM0 citations50
US7542136B2Jun 2, 2009
Flipping stage arrangement for reduced wafer contamination cross section and improved measurement accuracy and throughput
IBM1 citations50
US7853345B2Dec 14, 2010
Offset determination method for measurement system matching
IBM1 citations44
US7477365B2Jan 13, 2009
Optical spot geometric parameter determination using calibration targets
IBM0 citations39