Inventor

CHIANG CHEN-CHIA

TW4 patents

⚠️ This page may combine multiple inventors who share the name “CHIANG CHEN-CHIA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TAIWAN SEMICONDUCTOR MFG CO LTD

1 patent

US10190209B2Jan 29, 2019

PVD apparatus and method with deposition chamber having multiple targets and magnets

TAIWAN SEMICONDUCTOR MFG CO LTD4 citations71

TAIWAN SEMICONDUCTOR MFG

1 patent

US6071831AJun 6, 2000

Method of reducing spiral defects by adding an isopropyl alcohol rinse step before depositing sog

TAIWAN SEMICONDUCTOR MFG2 citations58

KAO CHUNG-EN

1 patent

US9708706B2Jul 18, 2017

PVD apparatus and method with deposition chamber having multiple targets and magnets

KAO CHUNG-EN1 citations47

YANG WEN-CHENG

1 patent

US9026241B2May 5, 2015

Closed loop control for reliability

YANG WEN-CHENG0 citations33