Inventor

HALLER KURT LINDSAY

US2 patents

⚠️ This page may combine multiple inventors who share the name “HALLER KURT LINDSAY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KLA TENCOR TECH CORP

1 patent

US7728965B2Jun 1, 2010

Systems and methods for inspecting an edge of a specimen

KLA TENCOR TECH CORP23 citations84

KLA TENCOR CORP

1 patent

US9052190B2Jun 9, 2015

Bright-field differential interference contrast system with scanning beams of round and elliptical cross-sections

KLA TENCOR CORP0 citations49