Inventor
CHEN HSUEH-CHUNG H
US5 patents
Patents
5 patentsUS9953916B2Apr 24, 2018
Critical dimension shrink through selective metal growth on metal hardmask sidewalls
IBM4 citations83
US9716038B2Jul 25, 2017
Critical dimension shrink through selective metal growth on metal hardmask sidewalls
IBM12 citations83
US9595473B2Mar 14, 2017
Critical dimension shrink through selective metal growth on metal hardmask sidewalls
IBM7 citations83
US10168075B2Jan 1, 2019
Critical dimension shrink through selective metal growth on metal hardmask sidewalls
IBM2 citations72
US8859384B1Oct 14, 2014
Inductor formation with sidewall image transfer
IBM0 citations51