Inventor
BARNES JEFFREY A
US13 patents
⚠️ This page may combine multiple inventors who share the name “BARNES JEFFREY A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ENTEGRIS INC
5 patentsUS10176979B2Jan 8, 2019
Post-CMP removal using compositions and method of use
ENTEGRIS INC10 citations83
US10392560B2Aug 27, 2019
Compositions and methods for selectively etching titanium nitride
ENTEGRIS INC4 citations71
US10557107B2Feb 11, 2020
Post chemical mechanical polishing formulations and method of use
ENTEGRIS INC1 citations58
US10347504B2Jul 9, 2019
Use of non-oxidizing strong acids for the removal of ion-implanted resist
ENTEGRIS INC0 citations39
US10340150B2Jul 2, 2019
Ni:NiGe:Ge selective etch formulations and method of using same
ENTEGRIS INC0 citations38
BARNES JEFFREY A
4 patentsUS8754021B2Jun 17, 2014
Non-amine post-CMP composition and method of use
BARNES JEFFREY A16 citations92
US9063431B2Jun 23, 2015
Aqueous cleaner for the removal of post-etch residues
BARNES JEFFREY A20 citations91
US9074170B2Jul 7, 2015
Copper cleaning and protection formulations
BARNES JEFFREY A26 citations90
US9546321B2Jan 17, 2017
Compositions and methods for selectively etching titanium nitride
BARNES JEFFREY A11 citations82