Inventor

HUANG HSING-YUAN

TW2 patents

Patents

2 patents

US11164937B2Nov 2, 2021

Semiconductor device and manufacturing method thereof

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations68

US11939664B2Mar 26, 2024

System and method for performing semiconductor processes with coated bell jar

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations54