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Inventor
SESHIA ASHWIN ARUNKUMAN
GB
2 patents
Patents
2 patents
US11340253B2
May 24, 2022
High performance micro-electro-mechanical systems accelerometer with electrostatic control of proof mass
CAMBRIDGE ENTPR LTD
0 citations
53
US11614463B2
Mar 28, 2023
High performance micro-electro-mechanical systems accelerometer
CAMBRIDGE ENTPR LTD
0 citations
42