Inventor
ALTINI VALERIO
NL4 patents
Patents
4 patentsUS11599027B2Mar 7, 2023
Lithographic process and apparatus and inspection process and apparatus
ASML NETHERLANDS BV0 citations58
US11360395B2Jun 14, 2022
Control method for a scanning exposure apparatus
ASML NETHERLANDS BV0 citations58
US11199782B2Dec 14, 2021
Lithographic process and apparatus and inspection process and apparatus
ASML NETHERLANDS BV0 citations58
US12449735B2Oct 21, 2025
Sub-field control of a lithographic process and associated apparatus
ASML NETHERLANDS BV0 citations55