Inventor
KAJITA SHINJI
JP8 patents
⚠️ This page may combine multiple inventors who share the name “KAJITA SHINJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
5 patentsUS6972256B2Dec 6, 2005
Method and apparatus for forming thin film of metal
EBARA CORP17 citations84
US10008380B2Jun 26, 2018
Substrate drying apparatus, substrate drying method and control program
EBARA CORP7 citations83
US8769842B2Jul 8, 2014
Substrate drying apparatus, substrate drying method and control program
EBARA CORP5 citations72
US11094548B2Aug 17, 2021
Apparatus for cleaning substrate and substrate cleaning method
EBARA CORP1 citations61
US7578887B2Aug 25, 2009
Apparatus for and method of processing substrate
EBARA CORP3 citations59