Inventor

YAN CHANGFEI

CN2 patents

Patents

2 patents

US11043239B2Jun 22, 2021

Magneto-optic Kerr effect metrology systems

KLA CORP1 citations57

US12164093B2Dec 10, 2024

Reflective compact lens for magneto-optic Kerr effect metrology system

KLA CORP0 citations46