Inventor
YOU HAI-YANG
CN3 patents
Patents
3 patentsUS11043239B2Jun 22, 2021
Magneto-optic Kerr effect metrology systems
KLA CORP1 citations57
US11543431B2Jan 3, 2023
Cantilever-type probe with multiple metallic coatings
KLA CORP0 citations51
US12164093B2Dec 10, 2024
Reflective compact lens for magneto-optic Kerr effect metrology system
KLA CORP0 citations46