Inventor
BENJAMIN RAJ DAEMIAN RAJ
US17 patents
Patents
17 patentsUS11956883B2Apr 9, 2024
Methods and apparatus for controlling RF parameters at multiple frequencies
APPLIED MATERIALS INC3 citations73
US11570879B2Jan 31, 2023
Methods and apparatus for controlling RF parameters at multiple frequencies
APPLIED MATERIALS INC3 citations71
US11501993B2Nov 15, 2022
Semiconductor substrate supports with improved high temperature chucking
APPLIED MATERIALS INC2 citations71
US11530482B2Dec 20, 2022
Faceplate having a curved surface
APPLIED MATERIALS INC1 citations70
US11339475B2May 24, 2022
Film stack overlay improvement
APPLIED MATERIALS INC2 citations70
US12110590B2Oct 8, 2024
Faceplate having a curved surface
APPLIED MATERIALS INC0 citations60
US12094689B2Sep 17, 2024
Switchable delivery for semiconductor processing system
APPLIED MATERIALS INC0 citations60
US11851759B2Dec 26, 2023
Faceplate having a curved surface
APPLIED MATERIALS INC0 citations60
US11946686B2Apr 2, 2024
Thermally stable flow meters for precision fluid delivery
APPLIED MATERIALS INC0 citations59
US12338530B2Jun 24, 2025
Shaped showerhead for edge plasma modulation
APPLIED MATERIALS INC0 citations58
US12159785B2Dec 3, 2024
Dynamic multi zone flow control for a processing system
APPLIED MATERIALS INC0 citations58
US11798803B2Oct 24, 2023
Dynamic multi zone flow control for a processing system
APPLIED MATERIALS INC0 citations58
US11776835B2Oct 3, 2023
Power supply signal conditioning for an electrostatic chuck
APPLIED MATERIALS INC0 citations58
US12563992B2Feb 24, 2026
Systems and methods to reduce flow accuracy error for liquid and gas mass flow controller devices
APPLIED MATERIALS INC0 citations51
US12473637B2Nov 18, 2025
Interlock system for processing chamber exhaust assembly
APPLIED MATERIALS INC0 citations50
US12297946B2May 13, 2025
Modular multi-directional gas mixing block
APPLIED MATERIALS INC0 citations45
US11145504B2Oct 12, 2021
Method of forming film stacks with reduced defects
APPLIED MATERIALS INC0 citations45