Inventor
ALAM SYED A
US4 patents
Patents
4 patentsUS11881416B2Jan 23, 2024
Gas delivery system for a shared gas delivery architecture
APPLIED MATERIALS INC2 citations65
US12563992B2Feb 24, 2026
Systems and methods to reduce flow accuracy error for liquid and gas mass flow controller devices
APPLIED MATERIALS INC0 citations51
US12473637B2Nov 18, 2025
Interlock system for processing chamber exhaust assembly
APPLIED MATERIALS INC0 citations50
US12297946B2May 13, 2025
Modular multi-directional gas mixing block
APPLIED MATERIALS INC0 citations45