Inventor
KOLCHIN PAVEL
US11 patents
⚠️ This page may combine multiple inventors who share the name “KOLCHIN PAVEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
10 patentsUS9726617B2Aug 8, 2017
Apparatus and methods for finding a best aperture and mode to enhance defect detection
KLA TENCOR CORP20 citations91
US9709510B2Jul 18, 2017
Determining a configuration for an optical element positioned in a collection aperture during wafer inspection
KLA TENCOR CORP23 citations90
US10887580B2Jan 5, 2021
Three-dimensional imaging for semiconductor wafer inspection
KLA TENCOR CORP8 citations82
US9989479B1Jun 5, 2018
System and method to determine depth for optical wafer inspection
KLA TENCOR CORP6 citations81
US9389349B2Jul 12, 2016
System and method to determine depth for optical wafer inspection
KLA TENCOR CORP12 citations81
US9734422B2Aug 15, 2017
System and method for enhanced defect detection with a digital matched filter
KLA TENCOR CORP5 citations72
US10317347B2Jun 11, 2019
Determining information for defects on wafers
KLA TENCOR CORP2 citations70
US10132760B2Nov 20, 2018
Apparatus and methods for finding a best aperture and mode to enhance defect detection
KLA TENCOR CORP1 citations51
US10571407B2Feb 25, 2020
Determining information for defects on wafers
KLA TENCOR CORP0 citations49
US10215713B2Feb 26, 2019
Determining a configuration for an optical element positioned in a collection aperture during wafer inspection
KLA TENCOR CORP0 citations48