Inventor

HUDSON ERIC A

US89 patents

⚠️ This page may combine multiple inventors who share the name “HUDSON ERIC A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HUDSON ERIC A

LAM RES CORP

Technique to deposit sidewall passivation for high aspect ratio cylinder etch

Plasma-enhanced etching in an augmented plasma processing system

Method for plasma etching using periodic modulation of gas chemistry

Methods for running a high density plasma etcher to achieve reduced transistor device damage

Integrated etch/clean for dielectric etch applications

Mask shrink layer for high aspect ratio dielectric etch

Technique to deposit sidewall passivation for high aspect ratio cylinder etch

Technique to deposit metal-containing sidewall passivation for high aspect ratio cylinder etch

Technique to deposit sidewall passivation for high aspect ratio cylinder etch

Technique to deposit sidewall passivation for high aspect ratio cylinder etch

Technique to deposit sidewall passivation for high aspect ratio cylinder etch

Technique to deposit sidewall passivation for high aspect ratio cylinder etch

High aspect ratio etch using modulation of RF powers of various frequencies

Method for plasma stripping using periodic modulation of gas chemistry and hydrocarbon addition

High aspect ratio etch using modulation of RF powers of various frequencies

Reduction of feature critical dimensions

Methods and apparatus for determining an etch endpoint in a plasma processing system

Technique to deposit sidewall passivation for high aspect ratio cylinder etch

Technique to tune sidewall passivation deposition conformality for high aspect ratio cylinder etch

Ion to neutral control for wafer processing with dual plasma source reactor

System, method and apparatus for plasma etch having independent control of ion generation and dissociation of process gas

Magnetic enhancement for mechanical confinement of plasma

Etch features with reduced line edge roughness

In-situ plug fill

Plasma in-situ treatment of chemically amplified resist

Technique to deposit sidewall passivation for high aspect ratio cylinder etch

Reduction of feature critical dimensions

Mask shrink layer for high aspect ratio dielectric etch

UNITED TECHNOLOGIES CORP

Temperature tolerant vane assembly

Turbine airfoil platform cooling circuit

Thin seal for an engine

Thin seal for an engine

Turbine airfoil cooling flow particle separator

Investment casting cores and methods

Variable area turbine vane arrangement

Compact advanced passive tip clearance control

High response turbine tip clearance control system

Core assembly including studded spacer

Variable area turbine arrangement with secondary flow modulation

Self crystalline orientation for increased compliance

HUDSON ERIC A

Airfoil cooling circuits

System, method and apparatus for plasma etch having independent control of ion generation and dissociation of process gas

Cooled turbine blade shroud

Particle resistant in-wall cooling passage inlet

MCCAFFREY MICHAEL G

Blade clearance control using high-CTE and low-CTE ring members

3D contoured vane endwall for variable area turbine vane arrangement

Platformless turbine blade

RAYTHEON TECH CORP

Thin seal for an engine

CAPRARIO JOSEPH T

Cover plate for turbine rotor having enclosed pump for cooling air

JOE CHRISTOPHER R

Filter system for blade outer air seal