Inventor
FUJIWARA NARIAKI
JP8 patents
Patents
8 patentsUS5493401AFeb 20, 1996
Method of measuring film thicknesses
DAINIPPON SCREEN MFG80 citations95
US5136149AAug 4, 1992
Method of focusing optical head on object body and automatic focusing device for optical inspection system including tilt detection
DAINIPPON SCREEN MFG62 citations95
US6000996ADec 14, 1999
Grinding process monitoring system and grinding process monitoring method
DAINIPPON SCREEN MFG62 citations94
US5251011AOct 5, 1993
Displacement detection system
DAINIPPON SCREEN MFG28 citations86
US5715061AFeb 3, 1998
Optical measuring apparatus and optical measuring method
DAINIPPON SCREEN MFG19 citations82
US5422703AJun 6, 1995
Reflected light measuring method and reflected light measuring apparatus for a microscopic photometric system
DAINIPPON SCREEN MFG19 citations81
US5048960ASep 17, 1991
Microspectroscope
DAINIPPON SCREEN MFG16 citations73
US7012702B2Mar 14, 2006
Measuring apparatus
DAINIPPON SCREEN MFG5 citations55