Inventor
DAVIS JEFFRY A
US13 patents
⚠️ This page may combine multiple inventors who share the name “DAVIS JEFFRY A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SEMITOOL INC
12 patentsUS6447232B1Sep 10, 2002
Semiconductor wafer processing apparatus having improved wafer input/output handling system
SEMITOOL INC499 citations98
US7278813B2Oct 9, 2007
Automated processing system
SEMITOOL INC27 citations90
US6942738B1Sep 13, 2005
Automated semiconductor processing system
SEMITOOL INC35 citations90
US6273110B1Aug 14, 2001
Automated semiconductor processing system
SEMITOOL INC32 citations89
US6900132B2May 31, 2005
Single workpiece processing system
SEMITOOL INC22 citations88
US8028978B2Oct 4, 2011
Wafer handling system
SEMITOOL INC11 citations82
US6723174B2Apr 20, 2004
Automated semiconductor processing system
SEMITOOL INC15 citations82
US6799932B2Oct 5, 2004
Semiconductor wafer processing apparatus
SEMITOOL INC11 citations73
US6652219B2Nov 25, 2003
Semiconductor wafer processing apparatus having improved wafer input/output handling system
SEMITOOL INC12 citations73
US6736148B2May 18, 2004
Automated semiconductor processing system
SEMITOOL INC12 citations71
US6599075B2Jul 29, 2003
Semiconductor wafer processing apparatus
SEMITOOL INC6 citations62
US6454514B2Sep 24, 2002
Microelectronic workpiece support and apparatus using the support
SEMITOOL INC1 citations51