Inventor
CHEN TZU-SHIN
TW6 patents
⚠️ This page may combine multiple inventors who share the name “CHEN TZU-SHIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
UNITED MICROELECTRONICS CORP
3 patentsUS6755726B2Jun 29, 2004
Polishing head with a floating knife-edge
UNITED MICROELECTRONICS CORP14 citations81
US6569771B2May 27, 2003
Carrier head for chemical mechanical polishing
UNITED MICROELECTRONICS CORP10 citations72
US7070490B2Jul 4, 2006
Vacuum suction membrane for holding silicon wafer
UNITED MICROELECTRONICS CORP5 citations57
TAIWAN SEMICONDUCTOR MFG CO LTD
3 patentsUS10872873B2Dec 22, 2020
Method for bonding wafers and bonding tool
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations70
US10792783B2Oct 6, 2020
System, control method and apparatus for chemical mechanical polishing
TAIWAN SEMICONDUCTOR MFG CO LTD6 citations66
US10050159B2Aug 14, 2018
Lens structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48