Inventor
SOPER ROBERT A
US4 patents
Patents
4 patentsUS6787469B2Sep 7, 2004
Double pattern and etch of poly with hard mask
TEXAS INSTRUMENTS INC99 citations96
US6764795B2Jul 20, 2004
Method and system for mask pattern correction
TEXAS INSTRUMENTS INC46 citations91
US6807661B2Oct 19, 2004
Correcting a mask pattern using a clip mask
TEXAS INSTRUMENTS INC2 citations59
US6785878B2Aug 31, 2004
Correcting a mask pattern using multiple correction grids
TEXAS INSTRUMENTS INC4 citations54