Inventor

BLANCO IGNACIO

US2 patents

Patents

2 patents

US7112546B2Sep 26, 2006

Method of manufacturing semiconductor devices comprising a deposition tool cleaning process having a moving plasma zone

TEXAS INSTRUMENTS INC4 citations55

US7815738B2Oct 19, 2010

Deposition tool cleaning process having a moving plasma zone

TEXAS INSTRUMENTS INC0 citations44