Inventor
PARK WON-TAEK
KR5 patents
Patents
5 patentsUS7355357B2Apr 8, 2008
Plasma accelerator
SAMSUNG ELECTRONICS CO LTD14 citations76
US7309961B2Dec 18, 2007
Driving frequency modulation system and method for plasma accelerator
SAMSUNG ELECTRONICS CO LTD9 citations69
US7276140B2Oct 2, 2007
Plasma accelerating apparatus for semiconductor substrate processing and plasma processing system having the same
SAMSUNG ELECTRONICS CO LTD3 citations59
US6903521B2Jun 7, 2005
Electromagnetic induced accelerator
SAMSUNG ELECTRONICS CO LTD6 citations59
US7253572B2Aug 7, 2007
Electromagnetic induced accelerator based on coil-turn modulation
SAMSUNG ELECTRONICS CO LTD4 citations58